Amari, Nabil and Folio, David and Ferreira, Antoine


This paper presents a study of the control problem of a laser beam illuminating and focusing a microobject subjected to dynamic disturbances using light intensity for feedback only. The main idea is to guide and track the beam with a hybrid micro/nanomanipulator which is driven by a control signal generated by processing the beam intensity sensed by a four-quadrant photodiode. Since the pointing location of the beam depends on real-time control issues related to temperature variation, vibrations, output intensity control, and collimation of the light output, the 2-D beam location to the photodiode sensor measurement output is estimated in real-time. We use the Kalman filter (KF) algorithm for estimating the state of the linear system necessary for implementing the proposed track-following control approach. To do so a robust master/slave control strategy for dual-stage micro/nanomanipulator is presented based on sensitivity function decoupling design methodology. The decoupled feedback controller is synthesized and implemented in a 6 dof micro/nanomanipulator capable of nanometer resolution through several hundreds micrometer range. A case study relevant to tracking a laser-beam for imaging purposes is presented


  • micromanipulation
  • micro/nanomanipulator
  • robust control
  • laser beam


  title = {Motion of a Micro/Nanomanipulator using a Laser Beam Tracking System},
  author = {Amari, Nabil and Folio, David and Ferreira, Antoine},
  journal = {International Journal of Optomechatronics},
  year = {2014},
  month = apr,
  number = {1},
  pages = {30--46},
  volume = {8},
  doi = {10.1080/15599612.2014.890813},
  hal = {00977949},
  keywords = {micromanipulation, micro/nanomanipulator, robust control, laser beam},
  publisher = {Taylor \& Francis}